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Exposure Equipment |
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FEATURES |
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Optical design that is small but powerful |
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High stability, long durability, ozoneless lamp |
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Possible to decide wavelength range based on the application |
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Automatic system with remote control |
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Full effort of anti-noise system |
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Variable is possible for an irradiation head every 90 degrees. |
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The lamp arc monitor makes adjustment of optic axis very simple in the
time of lamp replacement. |
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Applications |
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The sealing of opposing liquid crystal, etc. |
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Adhesion of CD,DVD drives' pick up lenses and
components of electronic machines. |
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Many exposure patterns of micro devices (transistor,
lead frame) |
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Extra : an exposure light source for silicon wafer,
varies kinds of optical experiments. |
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The ultra-high pressure mercury lamp, from 250W to 2000W, with high quality
integrator lens and collimated lens is possible to transmit UV uniform
to the surface of irradiation. There is variety of irradiation parts. It
is possible to make filters based on the customer's need. We also have
semiconductor ware, exposure parts for crystal osilator, light source for
mask alignment, different kinds of optics, equipment for the exposure experiment
and so on.
For the ones whose maximum output is over 2kw or whose maximum area is
over 300mmΦ,uniform irradiation is possible with high quality integrator
lens and high precision collimation mirrors together. Please consult with
us. |
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About the wavelength range (Using Super high pressure mercury lamp) |
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Optical System |
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Ultra-high pressure mercury lamp |
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Ellipse Collection Mirror |
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Plane Reflective Mirror1 |
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Integrator Lens |
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Plane Reflective Mirror2 |
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Collimated Lens |
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Concentrate the UV, radiated from, radiated from (1) the Ultra-high pressure
mercury lamp, on (2) the Ellipse collection mirror. Change the direction
of irradiation to the horizontality at (3) the Flat reflective mirror No.1
and then do the incidence to (4) the integrator lens.
After making the distribution of the intensity of illumination uniform on the integrator lens, change the direction of irradiation to the verticality at (5) the Flat reflective mirror No. 2 and do incidence to (6) the collimated lens.
Make the UV distribution of the intensity of illumination uniform and parallel
with (6) the collimated lens.
When the surface of irradiation is parallel and uniform, do the incidence. |
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Data of UV Intensity |
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Measurem : UVP-365JW Measuring Wavelength : 365nm Unit : mW/cm² |
*1 Diameter of each irradiation unit's effective irradiation. |
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Light Source Unit External Dimension |
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Please refer to a PDF catalog below which includes the detailed data of
Light Source Unit External Dimention. |
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Power Supply Unit External DimensionESpecifications |
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Shutter Functions |
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• Hand Motion & Timer-Control (0.1S-9990Hr) |
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Adjustment of
Light Quantity |
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• By changing the power of lamp (70-100%)
• With a lamp input power display function |
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Lighting Time Display Function |
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• Accumulated lighting time display (with Lamp Life Display) |
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Remote Functions |
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• Power Input Signal, Lighting Signal
• Shutter Timer Starting Signal
• Shutter Manual Input Signal |
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Monitor Functions |
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• Shutter Opening Signal, Shutter Closing Signal
• Lighting Signal, Stably Lighting Signal
• Over-heat Alarm, Inter-lock Alarm
• Lamp Life Alarm |
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Copyright (C) SAN-EI ELECTRIC CO.,LTD. |
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